Growth of Carbon Nanotubes on Carbon/Cobalt Films with Different sp2/sp3 Ratios

被引:0
|
作者
Xu, Naiyun [1 ]
Tsang, Siu Hong [2 ]
Tay, Beng Kang [1 ]
Teo, Edwin Hang Tong [1 ]
Ng, Chee Mang [3 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
[2] Temasek Lab NTU, Singapore 639798, Singapore
[3] GLOBALFOUNDRIES Singapore Pte Ltd, Singapore 738406, Singapore
关键词
ELECTRICAL-PROPERTIES; INTERCONNECT; EMISSION;
D O I
10.1155/2013/730952
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The need of barrier layer such as SiO2 for carbon nanotubes (CNTs) growth limits their performance in electronic applications. In this study, conductive carbon/metal (carbon/cobalt-C:Co) composite films with the same metal content, but different sp(2)/sp(3) ratios, were deposited using dual-source filtered cathodic vacuum arc (FCVA) technique. Three different C:Co composite films were deposited at different temperatures; visible Raman spectroscopy indicates that the sp(2)-rich C:Co composite film forms at high temperature (500 degrees C), and high-resolution transmission electron microscopy (HRTEM) shows the formation of conducting graphitic-like sp(2) clusters and with Co nanoclusters embedded within them. Electrical measurement shows a significant decrease in film resistivity as sp(2)/sp(3) ratio increases. CNTs were successfully grown on the composite films by plasma-enhanced vapor deposition (PECVD) approach. Scanning electron microscopy (SEM) shows minor effect on the density of CNTs by varying the sp(2)/sp(3) ratio. The dependence of defect level of the as-grown CNTs is found to reduce as sp(2)/sp(3) ratio increases.
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页数:5
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