Growth of Carbon Nanotubes on Carbon/Cobalt Films with Different sp2/sp3 Ratios

被引:0
|
作者
Xu, Naiyun [1 ]
Tsang, Siu Hong [2 ]
Tay, Beng Kang [1 ]
Teo, Edwin Hang Tong [1 ]
Ng, Chee Mang [3 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
[2] Temasek Lab NTU, Singapore 639798, Singapore
[3] GLOBALFOUNDRIES Singapore Pte Ltd, Singapore 738406, Singapore
关键词
ELECTRICAL-PROPERTIES; INTERCONNECT; EMISSION;
D O I
10.1155/2013/730952
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The need of barrier layer such as SiO2 for carbon nanotubes (CNTs) growth limits their performance in electronic applications. In this study, conductive carbon/metal (carbon/cobalt-C:Co) composite films with the same metal content, but different sp(2)/sp(3) ratios, were deposited using dual-source filtered cathodic vacuum arc (FCVA) technique. Three different C:Co composite films were deposited at different temperatures; visible Raman spectroscopy indicates that the sp(2)-rich C:Co composite film forms at high temperature (500 degrees C), and high-resolution transmission electron microscopy (HRTEM) shows the formation of conducting graphitic-like sp(2) clusters and with Co nanoclusters embedded within them. Electrical measurement shows a significant decrease in film resistivity as sp(2)/sp(3) ratio increases. CNTs were successfully grown on the composite films by plasma-enhanced vapor deposition (PECVD) approach. Scanning electron microscopy (SEM) shows minor effect on the density of CNTs by varying the sp(2)/sp(3) ratio. The dependence of defect level of the as-grown CNTs is found to reduce as sp(2)/sp(3) ratio increases.
引用
收藏
页数:5
相关论文
共 50 条
  • [1] The effect of surface sp2/sp3 bonding ratios of carbon films on the field emission property
    Lu, ZL
    Zhang, BL
    Yao, N
    Zhang, XY
    Ma, BX
    Fan, ZQ
    IVESC2004: THE 5TH INTERNATIONAL VACUUM ELECTRON SOURCES CONFERENCE PROCEEDINGS, 2004, : 92 - 92
  • [2] In vitro cytotoxicity evaluation of nano-carbon particles with different sp2/sp3 ratios
    Li, S. S.
    Wu, B. J.
    Deng, Q. Y.
    Guo, Y. B.
    Leng, Y. X.
    Huang, N.
    MATERIALS SCIENCE AND ENGINEERING C-MATERIALS FOR BIOLOGICAL APPLICATIONS, 2017, 75 : 854 - 862
  • [3] Synthesis of DLC films with different sp2/sp3 ratios and their hydrophobic behaviour
    Paul, R.
    Das, S. N.
    Dalui, S.
    Gayen, R. N.
    Roy, R. K.
    Bhar, R.
    Pal, A. K.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2008, 41 (05)
  • [4] Influence on the sp3/sp2 character of the carbon on the insertion of nitrogen in RFMS carbon nitride films
    Bouchet-Fabre, B.
    Lazar, G.
    Ballutaud, D.
    Godet, C.
    Zellama, K.
    DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) : 700 - 704
  • [5] A technique for the sp2/sp3 characterisation of carbon materials
    Titantah, JT
    Lamoen, D
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2004, 201 (11): : 2492 - 2498
  • [6] sp2/sp3 Carbon Ratio in Graphite Oxide with Different Preparation Times
    Lee, D. W.
    Seo, J. W.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2011, 115 (06): : 2705 - 2708
  • [7] The role of the sp2:sp3 substrate content in carbon supported nanotube growth
    Cartwright, Richard J.
    Esconjauregui, Santiago
    Weatherup, Robert S.
    Hardeman, David
    Guo, Yuzheng
    Wright, Eleanor
    Oakes, Daniel
    Hofmann, Stephan
    Robertson, John
    CARBON, 2014, 75 : 327 - 334
  • [9] On the determination of carbon sp2/sp3 ratios in polystyrene-polyethylene copolymers by photoelectron spectroscopy
    Turgeon, S
    Paynter, RW
    THIN SOLID FILMS, 2001, 394 (1-2) : 44 - 48
  • [10] Surface characterization of NCD films as a function of sp2/sp3 carbon and oxygen content
    Azevedo, A. F.
    Matsushima, J. T.
    Vicentin, F. C.
    Baldan, M. R.
    Ferreira, N. G.
    APPLIED SURFACE SCIENCE, 2009, 255 (13-14) : 6565 - 6570