Recent Progress in Ion Beam Fabrication of Integrated Optical Elements

被引：0

作者：

Banyasz, I. ^{[1
]}

Nagy, G. U. L. ^{[2
]}

Havranek, V. ^{[3
]}

Vosecek, V. ^{[3
]}

Agocs, E. ^{[4
]}

Fried, M. ^{[4
]}

Rakovics, V. ^{[4
]}

Pelli, S. ^{[5
]}

机构：

[1] Hungarian Acad Sci, Wigner Res Ctr Phys, POB 49, H-1525 Budapest, Hungary

[2] Hungarian Acad Sci, Inst Nucl Res, MTA Atomki, POB 51, H-4001 Debrecen, Hungary

[3] Nucl Phys Inst AV CR, Prague 25068, Czech Republic

[4] Hungarian Acad Sci, Ctr Energy Res, Res Inst Tech Phys & Mat Sci, POB 49, H-1525 Budapest, Hungary

[5] CNR, IFAC, Nello Carrara Inst Appl Phys, MDF Lab, Via Madonna Piano 10, I-50019 Sesto Fiorentino, FI, Italy

来源：

2017 19TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS (ICTON) | 2017年

关键词：

integrated optics; planar optical waveguide; optical Bragg grating; ion implantation; spectroscopic ellipsometry; infrared reflectometry; WAVE-GUIDES; IMPLANTATION; LINBO3; IRRADIATION;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Planar optical waveguides and Bragg gratings were designed and written in various optical crystals with medium energy ion implantation. Some examples of the fabricated integrated optical elements are presented in this article: Planar optical waveguides fabricated in Er: LiNbO3 crystal by irradiation with 5 MeV N3+ ions, and Bragg gratings fabricated by multi-energy implantation into a silicon substrate with N+ ions in the 800 keV - 3.5 MeV energy range. The SRIM code was used for planning the optical elements. The ion implanted optical elements were tested by spectroscopic ellipsometry and visible and infrared reflectometry. The results show that the proposed fabrication methods can produce integrated optical elements of adequate parameters.

引用

页数：4

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