Ion and electron beam assisted fabrication of nanostructures integrated in microfluidic chips

被引：15

作者：

Evstrapov, A. A. ^{[1
,2
,3
]}

Mukhin, I. S. ^{[1
,2
]}

Bukatin, A. S. ^{[2
,3
]}

Kukhtevich, I. V. ^{[1
]}

机构：

[1] St Petersburg State Univ Informat Technol Mech &, St Petersburg 197101, Russia

[2] St Petersburg Acad Univ, Nanotechnol Res & Educ Ctr RAS, Inst Russian Acad Sci, St Petersburg 194021, Russia

[3] Russian Acad Sci, Inst Analyt Instrumentat, St Petersburg 190103, Russia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2012年 / 282卷

关键词：

Ion beam; Electron beam; Microfluidics chips; Nanowhiskers; Nanochannel; CLSM; DNA-MOLECULES;

D O I：

10.1016/j.nimb.2011.08.035

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In present work we have designed and fabricated microfluidic chips (MFC) with integrated nets of nanochannels and whisker nanostructures in microchannels for investigation of biological samples in their native environment. We have designed a number of MFC topologies: (a) hydrodynamic traps with nanoscale channels which link microchannels; (b) a structure with regular vertical nanorod (nanowhisker) array, which could be used as a sensitive element. These topologies were created by means of ion and electron beam assisted techniques. These MFCs allow to investigate biological objects by means of high resolution microscopy. Fabricated MFCs were investigated with emulator of biological objects in different buffer solutions. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：145 / 148

页数：4

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