A review of ultrafast laser materials micromachining

被引：311
|
作者：
Cheng, Jian [1 ]
Liu, Chang-sheng [1 ]
Shang, Shuo [2 ]
Liu, Dun [2 ]
Perrie, Walter [2 ]
Dearden, Geoff [2 ]
Watkins, Ken [2 ]
机构：
[1] Northeastern Univ, Key Lab Anisotropy & Texture Mat, Minist Educ, Shenyang, Peoples R China
[2] Univ Liverpool, Laser Grp, Dept Engn, Liverpool L69 3BX, Merseyside, England
来源：
OPTICS AND LASER TECHNOLOGY | 2013年 / 46卷
关键词：
Ultrafast laser; Micromachining; Ablation mechanism; MOLECULAR-DYNAMICS SIMULATION; EMBEDDED-ATOM METHOD; EQUATION-OF-STATE; NONEQUILIBRIUM ELECTRON; DAMAGE THRESHOLD; 2ND-HARMONIC GENERATION; ABLATION THRESHOLDS; DIATOMIC-MOLECULES; THERMOELASTIC WAVE; COMMON METALS;
D O I：
10.1016/j.optlastec.2012.06.037
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A brief review is given regarding ultrafast laser micromachining of materials. Some general experimental observations are first provided to show the characteristics of ultrafast laser micromachining. Apart from empirical research, mathematical models also appear to allow for a further and systematic understanding of these phenomena. A few fundamental ultrafast laser micromachining mechanisms are addressed in an attempt to highlight the physics behind the experimental observations and the mathematical models. It is supposed that a vivid view of ultrafast laser micromachining has been presented by linking experimental observations, mathematical models and the behind physics. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：88 / 102
页数：15
相关论文
共 50 条
  • [1] Model for ultrafast laser micromachining
    Cangueiro, L.
    Audouard, E.
    Martin, P. E.
    Mottay, E.
    Ramos-de-Campos, J. A.
    Kupisiewicz, A.
    Bruneel, D.
    [J]. LASER-BASED MICRO- AND NANOPROCESSING XII, 2018, 10520
  • [2] A short review on functionalized metallic surfaces by ultrafast laser micromachining
    Chen, Zongjie
    Yang, Jin
    Liu, Hongbing
    Zhao, Yixuan
    Pan, Rui
    [J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2022, 119 (11-12): : 6919 - 6948
  • [3] A short review on functionalized metallic surfaces by ultrafast laser micromachining
    Zongjie Chen
    Jin Yang
    Hongbing Liu
    Yixuan Zhao
    Rui Pan
    [J]. The International Journal of Advanced Manufacturing Technology, 2022, 119 : 6919 - 6948
  • [4] Micromachining of industrial materials with ultrafast lasers
    Rizvi, NH
    Karnakis, D
    Gower, MC
    [J]. 20TH ICALEO 2001, VOLS 92 & 93, CONGRESS PROCEEDINGS, 2001, : 1511 - 1520
  • [5] Ultrafast laser processing of materials: a review
    Phillips, Katherine C.
    Gandhi, Hemi H.
    Mazur, Eric
    Sundaram, S. K.
    [J]. ADVANCES IN OPTICS AND PHOTONICS, 2015, 7 (04): : 684 - 712
  • [6] Ultrafast laser micromachining of silica aerogels
    Sun, J
    Longtin, JP
    Norris, PM
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 2001, 281 (1-3) : 39 - 47
  • [7] Ultrafast laser micromachining with a liquid film
    Sun, J
    Longtin, JP
    [J]. 20TH ICALEO 2001, VOLS 92 & 93, CONGRESS PROCEEDINGS, 2001, : 1571 - 1580
  • [8] Ultrafast Laser Processing of Diamond Materials: A Review
    Apostolova, Tzveta
    Kurylo, Vasyl
    Gnilitskyi, Iaroslav
    [J]. FRONTIERS IN PHYSICS, 2021, 9
  • [9] Dynamic ultrafast laser spatial tailoring for parallel micromachining of photonic devices in transparent materials
    Mauclair, C.
    Cheng, G.
    Huot, N.
    Audouard, E.
    Rosenfeld, A.
    Hertel, I. V.
    Stoian, R.
    [J]. OPTICS EXPRESS, 2009, 17 (05): : 3531 - 3542
  • [10] Micromachining of PZT using ultrafast femtosecond laser
    Uppal, N
    Shiakolas, PS
    Priya, S
    [J]. FERROELECTRICS LETTERS SECTION, 2005, 32 (3-4) : 67 - 77
12345