A review of ultrafast laser materials micromachining

被引：311

作者：

Cheng, Jian ^{[1
]}

Liu, Chang-sheng ^{[1
]}

Shang, Shuo ^{[2
]}

Liu, Dun ^{[2
]}

Perrie, Walter ^{[2
]}

Dearden, Geoff ^{[2
]}

Watkins, Ken ^{[2
]}

机构：

[1] Northeastern Univ, Key Lab Anisotropy & Texture Mat, Minist Educ, Shenyang, Peoples R China

[2] Univ Liverpool, Laser Grp, Dept Engn, Liverpool L69 3BX, Merseyside, England

来源：

OPTICS AND LASER TECHNOLOGY | 2013年 / 46卷

关键词：

Ultrafast laser; Micromachining; Ablation mechanism; MOLECULAR-DYNAMICS SIMULATION; EMBEDDED-ATOM METHOD; EQUATION-OF-STATE; NONEQUILIBRIUM ELECTRON; DAMAGE THRESHOLD; 2ND-HARMONIC GENERATION; ABLATION THRESHOLDS; DIATOMIC-MOLECULES; THERMOELASTIC WAVE; COMMON METALS;

D O I：

10.1016/j.optlastec.2012.06.037

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A brief review is given regarding ultrafast laser micromachining of materials. Some general experimental observations are first provided to show the characteristics of ultrafast laser micromachining. Apart from empirical research, mathematical models also appear to allow for a further and systematic understanding of these phenomena. A few fundamental ultrafast laser micromachining mechanisms are addressed in an attempt to highlight the physics behind the experimental observations and the mathematical models. It is supposed that a vivid view of ultrafast laser micromachining has been presented by linking experimental observations, mathematical models and the behind physics. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：88 / 102

页数：15

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