Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication

被引：171
|
作者：
Halbwax, M. [1 ]
Sarnet, T. [1 ]
Delaporte, Ph. [1 ]
Sentis, A. [1 ]
Etienne, H. [2 ]
Torregrosa, F. [2 ]
Vervisch, V. [2 ]
Perichaud, I. [3 ]
Martinuzzi, S. [3 ]
机构：
[1] CNRS, Lab LP3, UMR 6182 Luminy, F-13009 Marseille, France
[2] IBS, F-13790 Peynier, France
[3] Univ Aix Marseille 3, CNRS, UMR 6122, Lab TECSEN,Fac Sci Tech St Jerome, F-13397 Marseille 20, France
来源：
THIN SOLID FILMS | 2008年 / 516卷 / 20期
关键词：
nanotexturization; black silicon; photocurrent; femtosecond laser; plasma immersion doping;
D O I：
10.1016/j.tsf.2007.12.117
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have prepared absorbing structures for photovoltaic cells with different nanotexturization, obtained by means of a femtosecond laser,without the use of corrosive gas (under vacuum). To take in account the 3D structured front surface, the emitter doping has been realized by using Plasma Immersion Ion Implantation (so-called PULSION). The results show a photocurrent increase of about 30% in the laser textured zones. (c) 2008 Elsevier B. V. All rights reserved.
引用
收藏
页码：6791 / 6795
页数：5
相关论文
共 50 条
  • [1] Micro/Nano-Structuration of Silicon using Photonic Nanojet Mechanism
    Kallepalli, L. N. D.
    Grojo, D.
    Charmasson, L.
    Delaporte, P.
    Uteza, O.
    Merlen, A.
    Sangar, A.
    2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE AND INTERNATIONAL QUANTUM ELECTRONICS CONFERENCE (CLEO EUROPE/IQEC), 2013,
  • [2] Femtosecond laser for black silicon and photovoltaic cells
    Sarnet, T.
    Halbwax, M.
    Torres, R.
    Delaporte, P.
    Sentis, M.
    Martinuzzi, S.
    Vervisch, V.
    Torregrosa, F.
    Etienne, H.
    Roux, L.
    Bastide, S.
    COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST LASERS VIII, 2008, 6881
  • [3] Micro/nano scale amorphization of silicon by femtosecond laser irradiation
    Kiani, Amirkianoosh
    Venkatakrishnan, Krishnan
    Tan, Bo
    OPTICS EXPRESS, 2009, 17 (19): : 16518 - 16526
  • [4] Crystalline micro/nanostructures fabrication on silicon using femtosecond laser
    Deng, Guoliang
    Yang, Xianheng
    Feng, Guoying
    Zhou, Shouhuan
    XX INTERNATIONAL SYMPOSIUM ON HIGH-POWER LASER SYSTEMS AND APPLICATIONS 2014, 2015, 9255
  • [5] Femtosecond laser texturization for improvement of photovoltaic cells: Black Silicon
    Torres, R.
    Vervisch, V.
    Halbwax, M.
    Sarnet, T.
    Delaporte, P.
    Sentis, M.
    Ferreira, J.
    Barakel, D.
    Bastide, S.
    Torregrosa, F.
    Etienne, H.
    Roux, L.
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2010, 12 (03): : 621 - 625
  • [6] Nanostructure Formation in Silicon Photovoltaic Cells by Femtosecond Laser Pulses
    Taleb, A. M.
    Al-Naimee, K. A.
    Abdalah, S. F.
    Meucci, Riccardo
    Arecchi, F. T.
    APPLIED ELECTROMAGNETIC ENGINEERING FOR MAGNETIC, SUPERCONDUCTING AND NANOMATERIALS, 2011, 670 : 118 - +
  • [7] Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser
    Liu, Yanan
    Ding, Ye
    Xie, Jichang
    Chen, Mingjun
    Yang, Lijun
    Lv, Xun
    Yuan, Julong
    MATERIALS, 2022, 15 (14)
  • [8] Fabrication of Micro/nanostructures on Silicon using a Mixed Multiple Pulses Femtosecond Laser
    Luo, Hao
    Yu, Haibo
    Wen, Yangdong
    Li, Shendi
    Wang, Xiaoduo
    Qiu, Ye
    Liu, Lianqing
    2022 IEEE 22ND INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (NANO), 2022, : 93 - 96
  • [9] Laser micro/nano machining of silicon
    Rasheed, Bassam G.
    Ibrahem, Mohammed A.
    MICRON, 2021, 140
  • [10] Switchable wettability of silicon micro-nano structures surface produced by femtosecond laser
    Wang, X. Q.
    Ding, J. N.
    Yuan, N. Y.
    Wang, S. Y.
    Qiu, J. H.
    Kan, B.
    Guo, X. B.
    Zhu, Y. Y.
    MICRO-NANO TECHNOLOGY XV, 2014, 609-610 : 341 - +
12345