Vertical comb-drive MEMS mirror with sensing function for phase-shift device

被引：12
|
作者：
Oda, Kentaro [1 ]
Takao, Hidekuni [1 ]
Terao, Kyohei [1 ]
Suzuki, Takaaki [1 ]
Shimokawa, Fusao [1 ]
Ishimaru, Ichirou [1 ]
Ohira, Fumikazu [1 ]
机构：
[1] Kagawa Univ, Dept Intelligent Mech Syst Engn, Takamatsu, Kagawa 7610396, Japan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 181卷
关键词：
MEMS mirror; Vertical comb-drive actuator; Capacitance sensor; Phase shift;
D O I：
10.1016/j.sna.2012.04.007
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We aim to develop a MEMS mirror fabricated by micro-fabrication technology to realize a phase-shift device, which is a key component of a two-dimensional Fourier spectrometer. This MEMS mirror is capable of high-precision movement in the vertical direction parallel to the reference plane. In this study, a vertical electrostatic comb-drive actuator and capacitance sensor were fabricated monolithically on a single chip, and then four of them were mounted around the movable mirror. We fabricated a MEMS mirror that was able to move in the vertical direction while sensing the tilting angle. As a result, it would be feasible to use this vertical comb-drive MEMS mirror with a sensing function for a phase-shift device that was able to control the vertical displacement and the tilting angle of a movable mirror. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：61 / 69
页数：9
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