Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

被引：17
|
作者：
Tsai, Jui-che [1 ,2 ]
Lu, Li-Cheng [1 ,2 ]
Hsu, Wei-Chi [1 ,2 ]
Sun, Chia-Wei [3 ]
Wu, Ming C. [4 ,5 ]
机构：
[1] Natl Taiwan Univ, Grad Inst Photon & Optoelect, Taipei 10617, Taiwan
[2] Natl Taiwan Univ, Dept Elect Engn, Taipei 10617, Taiwan
[3] Ind Technol Res Inst, Med Elect & Device Technol Ctr, Hsinchu, Taiwan
[4] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[5] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 01期
关键词：
D O I：
10.1088/0960-1317/18/1/015015
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A driving scheme using a pair of differential voltages (V-x, V-y) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of +/- 3.2 is achieved experimentally in both the x and y directions with the differential voltages ranging from -10 V to + 10 V.
引用
收藏
页数：8
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