Computation of Capacitance for MEMS Comb-Drive Structures

被引：0
|
作者：
李明辉 [1 ]
高世桥 [1 ]
刘海鹏 [1 ]
梁新建 [1 ]
机构：
[1] School of Aerospace Science and Engineering,Beijing Institute of Technology
来源：
JournalofBeijingInstituteofTechnology | 2009年 / 18卷 / 01期
关键词：
comb-drive; edge effect; corner capacitor;
D O I：
10.15918/j.jbit1004-0579.2009.01.020
中图分类号：
TP211.4 [];
学科分类号：
0804 ; 080401 ; 080402 ;
摘要：
According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based on corner capacitor is presented and solved with the capacitance characteristic formula of nonlinear capacitor. Compared with the results of finite element method simulation, the model based on corner capacitor is more accurate than the models based on infinite parallel plate capacitor and parallel plate capacitor with edge effects.
引用
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页码：1 / 5
页数：5
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