Study of thermal effects and self-heating phenomena in planar power SOI MOS transistors

被引:1
|
作者
Chaplygin, Yu. A. [1 ]
Artamonova, E. A. [1 ]
Krasyukov, A. Yu. [1 ]
Krupkina, T. Yu. [1 ]
机构
[1] State Inst Elect Engn, Zelenograd 103498, Moscow Oblast, Russia
关键词
D O I
10.1134/S1063782608130150
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Heat removal problems, thermal effects, and self-heating phenomena occurring during operation of planar power SOI MOS transistors are considered. Using device-technological simulating methods, the transistor characteristics and safe operation range were studied. It was shown that limitations of the safe operation range are mostly associated with structure self-heating rather than with the parasitic bipolar transistor.
引用
收藏
页码:1522 / 1526
页数:5
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