ESD protection structure enhancement against Latch-Up issue using TCAD Simulation

被引:0
|
作者
Bourgeat, Johan [1 ]
Guitard, Nicolas [1 ]
David, Florence [1 ]
机构
[1] STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France
来源
2017 39TH ELECTRICAL OVERSTRESS/ELECTROSTATIC DISCHARGE SYMPOSIUM (EOS/ESD) | 2017年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
During IO qualification's LUP tests in CMOS28nm Bulk technology, undesired ESD structure triggering has been found to be the root cause of LUP fails. Deeper test analysis identifies the combination of IOs abutment sequence that generate the fail. The understanding of the phenomenon is investigated through a specific TCAD simulation set-up.
引用
收藏
页数:9
相关论文
共 50 条
  • [21] ESD and latch-up characteristics of semiconductor device with thin epitaxial substrate
    Suzuki, T
    Sekino, S
    Ito, S
    Monma, H
    ELECTRICAL OVERSTRESS/ELECTROSTATIC DISCHARGE SYMPOSIUM PROCEEDINGS, 1998, : 199 - 207
  • [22] ESD and Latch-up Design Verification Challenges in Packaged Parts and Modules
    Khazhinsky, Michael
    Harb, Mohammed
    Meng, Kuo-Hsuan
    2024 IEEE INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS, IPFA 2024, 2024,
  • [23] Application of transient interferometric mapping method for ESD and latch-up analysis
    Pogany, D.
    Bychikhin, S.
    Heer, M.
    Mamanee, W.
    Gornik, E.
    MICROELECTRONICS RELIABILITY, 2011, 51 (9-11) : 1592 - 1596
  • [24] ESD and latch-up characteristics of semiconductor device with thin epitaxial substrate
    Suzuki, T
    Sekino, S
    Ito, S
    Monma, H
    ELECTRICAL OVERSTRESS/ELECTROSTATIC DISCHARGE SYMPOSIUM PROCEEDINGS - 1998, 1998, : 199 - 207
  • [25] TCAD study of latch-up sensitivity to wafer thinning below 500 nm
    Hiblot, Gaspard
    Serbulova, Kateryna
    Hellings, Geert
    Chen, Shih-Hung
    2021 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS), 2021, : 121 - 124
  • [26] Trends and challenges to ESD and latch-up designs for nanometer CMOS technologies
    Boselli, G
    Duvvury, C
    MICROELECTRONICS RELIABILITY, 2005, 45 (9-11) : 1406 - 1414
  • [27] LATCH-UP FREE CMOS STRUCTURE.
    Anon
    IBM technical disclosure bulletin, 1986, 28 (09): : 4166 - 4167
  • [28] Influence of Latch-Up Immunity Structure on ESD Robustness of SOI-LIGBT Used As Output Device
    Ye, Ran
    Liu, Siyang
    Tian, Ye
    Xue, Ying
    Sun, Weifeng
    Su, Wei
    Lin, Feng
    Sun, Guipeng
    Ma, Shulang
    Liu, Yuwei
    IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2018, 18 (02) : 284 - 290
  • [29] High holding current SCRs (HHI-SCR) for ESD protection and latch-up immune IC operation
    Mergens, MPJ
    Russ, CC
    Verhaege, KG
    Armer, J
    Jozwiak, PC
    Mohn, R
    MICROELECTRONICS RELIABILITY, 2003, 43 (07) : 993 - 1000
  • [30] Transient latch-up:: experimental analysis and device simulation
    Bargstädt-Franke, S
    Stadler, W
    Esmark, K
    Streibl, M
    Domanski, K
    Gieser, H
    Wolf, H
    Bala, W
    MICROELECTRONICS RELIABILITY, 2005, 45 (02) : 297 - 304