Thin carbon films. I: Growth by charged particle beams

被引：2
|
作者：
Semyonov, AP [1 ]
Semyonova, IA [1 ]
机构：
[1] Russian Acad Sci, Siberian Div, Buryat Sci Ctr, Dept Phys Problems, Ulan Ude 670047, Buryat Republic, Russia
来源：
TECHNICAL PHYSICS | 2004年 / 49卷 / 04期
关键词：
Charged Particle; Carbon Film; Technical Characteristic; Particle Beam; Thin Carbon;
D O I：
10.1134/1.1736919
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A magnetron-discharge-based source of ions and electrons with cold hollow and uncooled rodlike cathodes that offers improved physical and technical characteristics is considered. (C) 2004 MAIK "Nauka / Interperiodica".
引用
收藏
页码：479 / 484
页数：6
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