Long-term hermeticity and biological performance of anodically bonded glass-silicon implantable packages

被引:16
|
作者
Harpster, TJ [1 ]
Nikles, SA [1 ]
Dokmeci, MR [1 ]
Najafi, K [1 ]
机构
[1] Univ Michigan, Ctr Wireless Integrated Microsyst, Ann Arbor, MI 48109 USA
基金
美国国家卫生研究院;
关键词
biocompatible package; hermetic package; in vivo testing; microsystems packages;
D O I
10.1109/TDMR.2005.854374
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reviews long-term test results obtained from a series of tests on glass-silicon (Si) hermetically sealed packages. Results are presented from 1) a 9.9-year ongoing room temperature phosphate-buffered saline (PBS) soak test of four packages; 2) accelerated soak tests in high temperature saline of 28 samples resulting in an extrapolated mean-time-to-failure (MTTF) at 37 degrees C of 177 years; 3) a 2.7-year in vitro 97 degrees C PBS soak test of a single package; and 4) in situ hermeticity and biocompatibility tests from 12 packages implanted in four guinea pigs-three packages implanted in two guinea pigs (each) for 1 month and another two guinea pigs for 20 and 22 months. All of the packages remained hermetically sealed over the lifetime of the implant. A detailed histological report of the implants is provided suggesting that they elicit no profound adverse reaction from the body.
引用
收藏
页码:458 / 466
页数:9
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