A Flexible ZnO Nanowire-Based Humidity Sensor

被引：25

作者：

Hsueh, H. T. ^{[1
,2
]}

Hsueh, T. J. ^{[2
]}

Chang, S. J. ^{[3
,4
]}

Hung, F. Y. ^{[5
]}

Hsu, C. L. ^{[6
]}

Dai, B. T. ^{[2
]}

Lam, K. T. ^{[7
]}

Wen, K. H. ^{[7
]}

机构：

[1] Natl Cheng Kung Univ, Inst Nanotechnol & Microsyst Engn, Tainan 701, Taiwan

[2] Natl Nano Device Labs, Tainan 741, Taiwan

[3] Natl Cheng Kung Univ, Inst Microelect, Ctr Miscro Nano Sci & Technol, Adv Optoelect Technol Ctr, Tainan 701, Taiwan

[4] Natl Cheng Kung Univ, Dept Elect Engn, Ctr Miscro Nano Sci & Technol, Adv Optoelect Technol Ctr, Tainan 701, Taiwan

[5] Natl Cheng Kung Univ, Inst Nanotechnol & Microsyst Engn, Tainan 701, Taiwan

[6] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

[7] Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350002, Peoples R China

来源：

IEEE TRANSACTIONS ON NANOTECHNOLOGY | 2012年 / 11卷 / 03期

关键词：

Flexible substrate; humidity sensor; ZnO nanowires (NWs); GAS SENSORS; THIN-FILMS; NANORODS; GROWTH; TEMPERATURE; ARRAYS; FABRICATION; COMPOSITE; MICRORODS; TIO2;

D O I：

10.1109/TNANO.2011.2168975

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the authors report the direct growth of ZnO nanowires (NWs) on a flexible substrate by the hydrothermal process and the fabrication of ZnO NW-based humidity sensor. It was found that average length and diameter of the ZnO NWs were 0.6 mu m and 50 nm, respectively. It was also found that resistance of the ZnO NWs decreased by 45% as we increased the relative humidity from 52% to 90%. Furthermore, it was found that measured resistance was very stable with negligible fluctuation after 16 days continuous testing.

引用

页码：520 / 525

页数：6

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