A Flexible ZnO Nanowire-Based Humidity Sensor

被引：25

作者：

Hsueh, H. T. ^{[1
,2
]}

Hsueh, T. J. ^{[2
]}

Chang, S. J. ^{[3
,4
]}

Hung, F. Y. ^{[5
]}

Hsu, C. L. ^{[6
]}

Dai, B. T. ^{[2
]}

Lam, K. T. ^{[7
]}

Wen, K. H. ^{[7
]}

机构：

[1] Natl Cheng Kung Univ, Inst Nanotechnol & Microsyst Engn, Tainan 701, Taiwan

[2] Natl Nano Device Labs, Tainan 741, Taiwan

[3] Natl Cheng Kung Univ, Inst Microelect, Ctr Miscro Nano Sci & Technol, Adv Optoelect Technol Ctr, Tainan 701, Taiwan

[4] Natl Cheng Kung Univ, Dept Elect Engn, Ctr Miscro Nano Sci & Technol, Adv Optoelect Technol Ctr, Tainan 701, Taiwan

[5] Natl Cheng Kung Univ, Inst Nanotechnol & Microsyst Engn, Tainan 701, Taiwan

[6] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

[7] Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350002, Peoples R China

来源：

IEEE TRANSACTIONS ON NANOTECHNOLOGY | 2012年 / 11卷 / 03期

关键词：

Flexible substrate; humidity sensor; ZnO nanowires (NWs); GAS SENSORS; THIN-FILMS; NANORODS; GROWTH; TEMPERATURE; ARRAYS; FABRICATION; COMPOSITE; MICRORODS; TIO2;

D O I：

10.1109/TNANO.2011.2168975

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the authors report the direct growth of ZnO nanowires (NWs) on a flexible substrate by the hydrothermal process and the fabrication of ZnO NW-based humidity sensor. It was found that average length and diameter of the ZnO NWs were 0.6 mu m and 50 nm, respectively. It was also found that resistance of the ZnO NWs decreased by 45% as we increased the relative humidity from 52% to 90%. Furthermore, it was found that measured resistance was very stable with negligible fluctuation after 16 days continuous testing.

引用

页码：520 / 525

页数：6

共 50 条

[11] Silicon nanowire-based ammonia gas sensor with enhanced response at elevated humidity levels
Sultan, M. T.
Fakhri, E.
Powroznik, P.
Manolescu, A.
Jakubik, W.
Kazmierczak-Balata, A.
Svavarsson, H. G.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2025, 40 (03)
[12] Carbon nanowire-based temperature sensor
Zaitsev, Alexander M.
Levine, Alfred M.
Zaidi, Sohail H.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2007, 204 (10): : 3574 - 3579
[13] Nanowire-based electromechanical biomimetic sensor
Tonisch, K.
Cimalla, V.
Will, F.
Weise, F.
Stubenrauch, M.
Albrecht, A.
Hoffmann, M.
Ambacher, O.
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2007, 37 (1-2): : 208 - 211
[14] ZnO single nanowire-based UV detectors
Das, Sachindra Nath
Moon, Kyeong-Ju
Kar, Jyoti Prakash
Choi, Ji-Hyuk
Xiong, Junjie
Lee, Tae Il
Myoung, Jae-Min
APPLIED PHYSICS LETTERS, 2010, 97 (02)
[15] All-Printed ZnO Nanowire-Based High Performance Flexible Ultraviolet Photodetectors
Ma, Sihang
Dahiya, Abhishek Singh
Christou, Adamos
De Pamphilis, Luca
Dahiya, Ravinder
IEEE Journal on Flexible Electronics, 2023, 2 (02): : 216 - 222
[16] Si Nanowire-Based Humidity Sensors Prepared on Glass Substrate
Hsueh, H. T.
Hsueh, T. J.
Chang, S. J.
Hung, F. Y.
Weng, W. Y.
Hsu, C. L.
Dai, B. T.
IEEE SENSORS JOURNAL, 2011, 11 (11) : 3036 - 3041
[17] Electrical characteristics of ZnO nanowire-based field-effect transistors on flexible plastic substrates
Kang, Jeongmin
Keem, Kihyun
Jeong, Dong-Young
Kim, Sangsig
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (9B): : 6227 - 6229
[18] Massive assembly of ZnO nanowire-based integrated devices
Kang, Juwan
Myung, Sung
Kim, Byeongju
Oh, Dongjin
Kim, Gyu Tae
Hong, Seunghun
NANOTECHNOLOGY, 2008, 19 (09)
[19] Flexible Nanowire Cluster as a Wearable Colorimetric Humidity Sensor
Wei, Zhiqiang
Zhou, Zhang-Kai
Li, Qiuyu
Xue, Jiancai
Di Falco, Andrea
Yang, Zhongjian
Zhou, Jianhua
Wang, Xuehua
SMALL, 2017, 13 (27)
[20] Electroluminescence from ZnO nanowire-based heterojunction LED
Nakamura, D.
Tetsuyama, N.
Shimogaki, T.
Higashihata, M.
Ikenoue, H.
Okada, T.
OXIDE-BASED MATERIALS AND DEVICES V, 2014, 8987

← 1 2 3 4 5 →