High precision 2-D angle measurement using fringe analysis techniques

In this paper, a novel angle measurement method using the fringe analysis techniques is proposed. In this method, a 2-D surface profile including a tilt is obtained by fringe analysis, and the tilt in the 2-D surface profile is determined by fitting the obtained surface profile with a plane. From the fitted plane, 2-D angles can be easily obtained. Simulations using the Fourier transform and phase-shift methods are performed, and the results are compared with each other. Simulations show that 2-D angle measurement using the fringe analysis techniques can achieve simultaneously a wide measurement range and high precision.