Dynamic characteristics of ultra-precision aerostatic bearings

被引：30
|
作者：
Chen, Xue-Dong [1 ]
Zhu, Jin-Cheng [1 ]
Chen, Han [1 ]
机构：
[1] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China
来源：
ADVANCES IN MANUFACTURING | 2013年 / 1卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Aerostatic bearing; Dynamic characteristics; Dynamic mesh; THRUST-BEARINGS;
D O I：
10.1007/s40436-013-0013-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aerostatic bearings are investigated. Due to compressibility of the gas, the dynamic characteristics of aerostatic bearings show nonlinear frequency dependence. Particularly, their nonlinear dynamic behaviors are quite remarkable for ultra-precision aerostatic bearings with small air gap heights and high supply pressure.
引用
收藏
页码：82 / 86
页数：5
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