Dynamic characteristics of ultra-precision aerostatic bearings

被引：30
|
作者：
Chen, Xue-Dong [1 ]
Zhu, Jin-Cheng [1 ]
Chen, Han [1 ]
机构：
[1] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China
来源：
ADVANCES IN MANUFACTURING | 2013年 / 1卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Aerostatic bearing; Dynamic characteristics; Dynamic mesh; THRUST-BEARINGS;
D O I：
10.1007/s40436-013-0013-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aerostatic bearings are investigated. Due to compressibility of the gas, the dynamic characteristics of aerostatic bearings show nonlinear frequency dependence. Particularly, their nonlinear dynamic behaviors are quite remarkable for ultra-precision aerostatic bearings with small air gap heights and high supply pressure.
引用
收藏
页码：82 / 86
页数：5
相关论文
共 50 条
  • [21] An ultra-precision air-pin sensor and its dynamic characteristics
    Zhang, H
    Deng, SX
    Wang, HQ
    Chen, S
    [J]. MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI, 2005, 295-296 : 557 - 562
  • [22] Calculation and Analysis for Stiffness of the Thrust Aerostatic Bearing of Ultra-precision Machine Tools
    Lu Lihua
    Zhao Ziqiang
    Liang Yingchun
    Zhang Longjiang
    [J]. 5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, 2010, 7655
  • [23] Development of ultra-precision centering and leveling turntable using aerostatic bearing technology
    Hou Maosheng
    Tian Yanrong
    Ji Lin
    Wang Longxiao
    Liu Jiaqi
    Zhao Weiqian
    [J]. NINTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2015, 9446
  • [24] Study on Static Characteristics of Ultra-Precision Aerostatic Motorized Spindle under Gas-Magnetic Field Coupling
    Wang, Wenbo
    Song, Pengyun
    Yu, Hechun
    Zhang, Guoqing
    [J]. ELECTRONICS, 2022, 11 (09)
  • [25] A novel 5-DOFs dynamic model of aerostatic spindle considering the effect of process damping in ultra-precision machining
    Chen, Dongju
    Li, Shupei
    Fan, Jinwei
    [J]. JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2022, 36 (09) : 4339 - 4352
  • [26] A novel 5-DOFs dynamic model of aerostatic spindle considering the effect of process damping in ultra-precision machining
    Dongju Chen
    Shupei Li
    Jinwei Fan
    [J]. Journal of Mechanical Science and Technology, 2022, 36 : 4339 - 4352
  • [27] Controlled Porosity Alumina Structures for Ultra-Precision Hydrostatic Journal Bearings
    Durazo-Cardenas, Isidro S.
    Stephenson, David J.
    Corbett, John
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2010, 93 (11) : 3671 - 3678
  • [28] ULTRA-PRECISION SURFACE GRINDER SUSPENDED BY EXTERNALLY PRESSURIZED AIR BEARINGS
    KATO, S
    [J]. BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, 1982, 16 (01): : 51 - 56
  • [29] DYNAMIC CHARACTERISTICS OF AEROSTATIC THRUST-BEARINGS WITH POROUS INSERTS
    MAJUMDAR, BC
    [J]. JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 1980, 22 (02): : 55 - 58
  • [30] Identification of Dynamic Model for Ultra-precision Positioning System
    Chen Hui
    Zhou Xing-peng
    Tan Yong-hong
    Li Ru-qiong
    Zhang Ya-hong
    Dong Rui-li
    [J]. DIGITAL MANUFACTURING & AUTOMATION III, PTS 1 AND 2, 2012, 190-191 : 97 - +
12345