Electrical Signature Verification and Fault Localization in High-density DRAM Device Using Atomic Force Probe

被引:0
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作者
Wang, Wei-Chih [1 ]
Liew, San-Lin [1 ]
Chen, Hua-Sheng [1 ]
Chen, Kuang-Liang [1 ]
Luo, Jian-Shing [1 ]
机构
[1] Inotera Memories Inc, Phys & Elect Failure Anal Dept, Tao Yuan, Taiwan
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T [工业技术];
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08 ;
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页码:269 / 274
页数:6
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