Effect of probe contact resistance on precision measurements of sheet resistance of metallized thin films

被引：0

作者：

Yu, KM ^{[1
]}

Kim, KJ ^{[1
]}

Cheon, RJ ^{[1
]}

Kang, JH ^{[1
]}

机构：

[1] Korea Res Inst Stand & Sci, Taejon 305600, South Korea

来源：

JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 1999年 / 34卷

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We have developed a method to measure sheet resistances and contact resistances of metallized thin films simultaneously and investigated the effect of probe contact resistance on precision measurements of sheet resistances of the films because it is essential to make precision measurements of sheet resistance in order to determine dose and thickness uniformity of the films. We found there being a linear relation between them, so that contact properties directly effects on precision measurements of sheet resistance, that is, uniformity of the films. This results also have physical meaning that have similiar trends to spreading resistance method to determine sheet resistances from contact resistance measurements.

引用

页码：S347 / S349

页数：3

共 50 条

[1] Sheet Resistance Measurements of Conductive Thin Films: A Comparison of Techniques
Naftaly, Mira
Das, Satyajit
Gallop, John
Pan, Kewen
Alkhalil, Feras
Kariyapperuma, Darshana
Constant, Sophie
Ramsdale, Catherine
Hao, Ling
ELECTRONICS, 2021, 10 (08)
[2] Sheet resistance and resistivity measurements of thin conducting semiconducting and superconducting films
Krupka, Jerzy
2017 IEEE MTT-S INTERNATIONAL MICROWAVE WORKSHOP SERIES ON ADVANCED MATERIALS AND PROCESSES FOR RF AND THZ APPLICATIONS (IMWS-AMP), 2017,
[3] Measurements of the sheet resistance and conductivity of thin epitaxial graphene and SiC films
Krupka, J.
Strupinski, W.
APPLIED PHYSICS LETTERS, 2010, 96 (08)
[4] Contact Resistance in Flat Thin Films
Read, M. B.
Lang, J. H.
Slocum, A. H.
Martens, R.
PROCEEDINGS OF THE FIFTY-FIFTH IEEE HOLM CONFERENCE ON ELECTRICAL CONTACTS, 2009, : 300 - +
[5] SHEET RESISTANCE MEASUREMENTS WITH A 4-POINT PROBE
TONG, AH
DUPNOCK, A
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (08) : C300 - &
[6] Differential Thickness Layer Resistance Measurement method for measurements of contact resistance of organic semiconductor thin films
Nahlik, Josef
Hermanova, Martina
Bohacek, Jan
Fitl, Premysl
Vrnata, Martin
MEASUREMENT, 2015, 74 : 178 - 185
[7] Superconducting MoC thin films with enhanced sheet resistance
Trgala, M.
Zemlicka, M.
Neilinger, P.
Rehak, M.
Leporis, M.
Gazi, S.
Gregus, J.
Plecenik, T.
Roch, T.
Dobrocka, E.
Grajcar, M.
APPLIED SURFACE SCIENCE, 2014, 312 : 216 - 219
[8] Sheet resistance in BSCCO thin films with phase intergrowth
Sakai, K
Ota, H
Mori, Z
Aoki, R
CZECHOSLOVAK JOURNAL OF PHYSICS, 1996, 46 : 1375 - 1376
[9] INFLUENCE OF SOME GEOMETRIC FACTORS ON CONTACT RESISTANCE PROBE MEASUREMENTS
PINNEL, MR
BRADFORD, KF
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1980, 3 (01): : 159 - 165
[10] Texture and sheet resistance of Al alloy thin films on Ti and TiN thin films
Won-Jun Lee
Sun-Jae Kim
Wonhee Lee
Yoon-Jik Lee
Youn-Seoung Lee
Sa-Kyun Rha
Chong Ook Park
Journal of Materials Science: Materials in Electronics, 2004, 15 : 9 - 13

← 1 2 3 4 5 →