Sheet Resistance Measurements of Conductive Thin Films: A Comparison of Techniques

被引：67

作者：

Naftaly, Mira ^{[1
]}

Das, Satyajit ^{[2
]}

Gallop, John ^{[1
]}

Pan, Kewen ^{[1
]}

Alkhalil, Feras ^{[2
]}

Kariyapperuma, Darshana ^{[2
]}

Constant, Sophie ^{[1
]}

Ramsdale, Catherine ^{[2
]}

Hao, Ling ^{[1
]}

机构：

[1] Natl Phys Lab, Teddington TW11 0LW, Middx, England

[2] PragmatIC Semicond Ltd, Cambridge CB4 0WH, England

来源：

ELECTRONICS | 2021年 / 10卷 / 08期

基金：

“创新英国”项目;

关键词：

thin films; sheet resistance; four-point probe; microwave resonator; terahertz time-domain spectroscopy; TERAHERTZ; SPECTROSCOPY;

D O I：

10.3390/electronics10080960

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Conductive thin films are an essential component of many electronic devices. Measuring their conductivity accurately is necessary for quality control and process monitoring. We compare conductivity measurements on films for flexible electronics using three different techniques: four-point probe, microwave resonator and terahertz time-domain spectroscopy. Multiple samples were examined, facilitating the comparison of the three techniques. Sheet resistance values at DC, microwave and terahertz frequencies were obtained and were found to be in close agreement.

引用

页数：10

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