Effect of probe contact resistance on precision measurements of sheet resistance of metallized thin films

We have developed a method to measure sheet resistances and contact resistances of metallized thin films simultaneously and investigated the effect of probe contact resistance on precision measurements of sheet resistances of the films because it is essential to make precision measurements of sheet resistance in order to determine dose and thickness uniformity of the films. We found there being a linear relation between them, so that contact properties directly effects on precision measurements of sheet resistance, that is, uniformity of the films. This results also have physical meaning that have similiar trends to spreading resistance method to determine sheet resistances from contact resistance measurements.