Effects on Transparent Conductive Properties of the Indium Tin Oxide Films Deposited on Flexible Polyimide Substrates

被引：4

作者：

Bao, Yan ^{[1
]}

Wang, Yi-Xue ^{[1
]}

Tian, Wei-Hua ^{[1
]}

Mao, Hong-Yan ^{[1
]}

Zhang, Dong ^{[1
]}

Yu, Hong-Tao ^{[1
]}

Zhang, Yu-Yan ^{[1
]}

Wang, Sen ^{[1
]}

Meng, Xiang-Bin ^{[1
]}

Zhou, Zi-Yuan ^{[1
]}

Wei, Jia-Peng ^{[1
]}

机构：

[1] Shenyang Inst Engn, Dept Automat, Shenyang 110136, Liaoning, Peoples R China

来源：

SCIENCE OF ADVANCED MATERIALS | 2019年 / 11卷 / 04期

关键词：

Magnetron Sputtering; Polyimide (PI); Flexible Substrate; ITO Transparent Conductive Film; ITO THIN-FILM; STRUCTURAL-PROPERTIES; GAS SENSOR; LAYER;

D O I：

10.1166/sam.2019.3461

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Indium tin oxide (ITO) films were deposited on flexible polyimide (PI) substrates by DC magnetron sputtering. The photo-electrical properties of ITO films were tested by probe step meter, hall test, ultraviolet visible spectrophotometer, X-ray diffraction (XRD) and atomic force microscopy (AFM). The results show that the transparent conductivity of ITO films is mainly influenced by the sputtering power and deposition pressure, which were investigated systematically. High quality photoelectric performance transparent ITO films with the average transmittance in the visible region is 86% and the resistivity of the as-grown films is 3.1x10(-4) Omega . cm. And the as-grown films were deposited at the optimized process conditions of the 100 W with sputtering power and 0.4 Pa with deposition pressure.

引用

页码：496 / 501

页数：6

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