Micro-machined, All Quartz Package, Passive Wireless SAW Pressure and Temperature Sensor

被引：0
|
作者：
Lardat, R. [1 ]
Penavaire, L. [1 ]
Menage, P. [1 ]
Chommeloux, L. [1 ]
Huet, H. [1 ]
Lestrat, C. [1 ]
Pastureaud, T. [1 ]
Haon, F. [1 ]
Steichen, W. [1 ]
Ballandras, S. [2 ]
Heider, G. [3 ]
机构：
[1] TEMEX, Sophia Antipolis, France
[2] CNRS, LPMO, FEMTO ST, Besancon, France
[3] SENSOR, Sophia Antipolis, France
来源：
2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS | 2006年
关键词：
SAW sensor; perturbation therory; Quartz micro-machining; All Quartz Package; Wafer bonding; Glass Frit;
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
An example of SAW P&T sensor is shown. This sensor is to operate for TPMS using the 434 MHz ISM band. Design of this sensor is based on simplicity, leading to micro-machined all quartz SAW device. Details of design process, realization and sensor responses are shown.
引用
收藏
页码：1441 / +
页数：2
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