共 50 条
- [2] A Micro-machined Ceramic Hot-plate for Gas Sensor Applications [J]. MACHINERY, MATERIALS SCIENCE AND ENGINEERING APPLICATIONS, PTS 1 AND 2, 2011, 228-229 : 558 - +
- [4] A Novel Gas Sensor in the Form of Micro-machined Resonator and its Readout Circuit [J]. 2011 IEEE SENSORS, 2011, : 1149 - 1152
- [5] Micro-machined Pendulum and Non-driven Micro-machined Gyroscope [J]. 2011 INTERNATIONAL CONFERENCE ON PHYSICS SCIENCE AND TECHNOLOGY (ICPST), 2011, 22 : 517 - 523
- [6] High Sensitivity Micro-Machined Piezoresistive Strain Sensor [J]. 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014, 87 : 1362 - 1365
- [8] Wafer level packaging of micro-machined gas sensors [J]. PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 746 - 748
- [9] Stress analysis of a micro-machined inertial sensor at dynamic load [J]. 2008 11TH IEEE INTERSOCIETY CONFERENCE ON THERMAL AND THERMOMECHANICAL PHENOMENA IN ELECTRONIC SYSTEMS, VOLS 1-3, 2008, : 945 - 948
- [10] A Micro-Machined Optical Fiber Cantilever as a Miniaturized pH Sensor [J]. IEEE SENSORS JOURNAL, 2015, 15 (12) : 7221 - 7228