共 50 条
- [31] Composition profiles of silicon-silicon oxide and silicon-rare earth oxide structures Technical Physics Letters, 2005, 31 : 564 - 566
- [35] EFFECT OF IMPURITIES AND STRUCTURAL PARAMETERS ON SILICON-SILICON OXIDE INTERFACES TRANSACTIONS OF THE METALLURGICAL SOCIETY OF AIME, 1965, 233 (03): : 536 - +
- [38] Process development of silicon-silicon carbide hybrid micro-engine structures MATERIALS SCIENCE OF MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES IV, 2002, 687 : 197 - 202