Systematic Study of Traps in AlN/GaN/AlGaN HEMTs on SiC Substrate by Numerical TCAD Simulation

被引:0
|
作者
Subramani, N. K. [1 ]
Sahoo, A. K. [1 ]
Nallatamby, J-C. [1 ]
Sommet, R. [1 ]
Quere, R. [1 ]
机构
[1] Univ Limoges, CNRS, XLIM UMR7252, F-19100 Brive, France
关键词
AlGaN HEMT; Silicon Carbide; AC simulation; trapping effects; Y parameters; ELECTRON-MOBILITY TRANSISTORS; GAN HEMTS;
D O I
暂无
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
In this work, we investigate the impact of GaN channel traps on the performance of AlN/GaN/AlGaN HEMT device grown on SiC substrate using two-dimensional TCAD physics based simulations. Traps specifications used here are acquired from the data reported in the literature. The simulated DC characteristics are compared with experimental measurements for validation, providing an appropriate feedback for future technological improvements. Furthermore using the Low Frequency (LF) AC simulations results, we demonstrate that the LF admittance dispersion measurement is an effective tool for identifying the traps in the device structure.
引用
收藏
页数:4
相关论文
共 50 条
  • [1] Thermal Analysis of AlN/GaN/AlGaN HEMTs grown on Si and SiC Substrate through TCAD Simulations and Measurements
    Sahoo, A. K.
    Subramani, N. K.
    Nallatamby, J-C.
    Sommet, R.
    Quere, R.
    Rolland, N.
    Medjdoub, F.
    [J]. 2016 11TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2016, : 149 - 152
  • [2] 2D study of AlGaN/AlN/GaN/AlGaN HEMTs' response to traps
    Hezabra, A.
    Abdeslam, N. A.
    Sengouga, N.
    Yagoub, M. C. E.
    [J]. JOURNAL OF SEMICONDUCTORS, 2019, 40 (02)
  • [3] 2D study of AlGaN/AlN/GaN/AlGaN HEMTs' response to traps
    A.Hezabra
    N.A.Abdeslam
    N.Sengouga
    M.C.E.Yagoub
    [J]. Journal of Semiconductors, 2019, (02) : 43 - 48
  • [4] Investigation of traps in AlGaN/GaN HEMTs on silicon substrate
    Wolter, M
    Marso, M
    Javorka, P
    Bernát, J
    Carius, R
    Lüth, H
    Kordos, P
    [J]. 5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS, 2003, 0 (07): : 2360 - 2363
  • [5] Characterization and modeling of traps and RF frequency dispersion in AlGaN/AlN/GaN HEMTs
    Sanchez-Martin, Hector
    Garcia-Perez, Oscar
    Iniguez-de-la-Torre, Ignacio
    Perez, Susana
    Gonzalez, Tomas
    Mateos, Javier
    Altuntas, Philippe
    Defrance, Nicolas
    Lesecq, Marie
    Hoel, Virginie
    Cordier, Yvon
    Rennesson, Stephanie
    [J]. 2016 11TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2016, : 157 - 160
  • [6] Reliability evaluation of AlGaN/GaN HEMTs grown on SiC substrate
    Lee, C
    Witkowski, L
    Muir, M
    Tserng, HQ
    Saunier, P
    Wang, H
    Yang, J
    Khan, MA
    [J]. IEEE LESTER EASTMAN CONFERENCE ON HIGH PERFORMANCE DEVICES, PROCEEDINGS, 2002, : 436 - 442
  • [7] Novel attributes of AlGaN/AlN/GaN/SiC HEMTs with the multiple indented channel
    Orouji, Ali A.
    Ghaffari, Majid
    [J]. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2015, 74 : 407 - 413
  • [8] Impact of the substrate and of the nucleation layer on the properties of AlGaN/GaN HEMTs on SiC
    Gamarra, P.
    Lacam, C.
    Tordjman, M.
    di Forte-Poisson, M-A
    [J]. JOURNAL OF CRYSTAL GROWTH, 2013, 370 : 282 - 287
  • [9] Reliability evaluation of high power AlGaN/GaN HEMTs on SiC substrate
    Kim, H
    Tilak, V
    Green, BM
    Smart, JA
    Schaff, WJ
    Shealy, JR
    Eastman, LF
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2001, 188 (01): : 203 - 206
  • [10] Comparison of AlGaN/GaN HEMTs Grown and Fabricated on Sapphire Substrate with AlN and GaN Nucleation Layers
    Gao, N.
    Fang, Y. L.
    Yin, J. Y.
    Wang, B.
    Guo, Y. M.
    He, Z. Z.
    Gu, G. D.
    Guo, H. Y.
    Feng, Z. H.
    Cai, S. J.
    [J]. 2017 14TH CHINA INTERNATIONAL FORUM ON SOLID STATE LIGHTING (SSLCHINA) : INTERNATIONAL FORUM ON WIDE BANDGAP SEMICONDUCTORS (IFWS), 2017, : 195 - 199