Contact resistance of low-temperature carbon nanotube vertical interconnects

被引：0
|
作者：
Vollebregt, Sten [1 ]
Chiaramonti, Ann N. [2 ]
Ishihara, Ryoichi [1 ]
Schellevis, Hugo [1 ]
Beenakker, Kees [1 ]
机构：
[1] Delft Univ Technol, Fac Elect Engn Math & Comp Sci, Delft Inst Microsyst & Nanoelect, NL-2628 CT Delft, Netherlands
[2] Natl Inst Stand & Technol, Mat Reliabil Div, Boulder, CO 80305 USA
来源：
2012 12TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2012年
关键词：
PERFORMANCE;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The electrical contact resistance and length dependant resistance of vertically aligned carbon nanotubes (CNT) grown at 500 degrees C with high tube density (10(11) cm(-2)) are investigated by measuring samples with different CNT lengths. Cross-sectional imaging revealed that the CNT tips are well embedded over a length of several hundred nm. The determined contact resistance of 18 k Omega is low, which is attributed to a combination of CNT tip embedding and tip growth mechanism. When the CNT mean free path determined by Raman spectroscopy is compared with that obtained from the electrical measurements, it shows that multiple walls are conducting in parallel per CNT.
引用
收藏
页数：5
相关论文
共 50 条
  • [21] Modeling, Fabrication, and Characterization of Large Carbon Nanotube Interconnects With Negative Temperature Coefficient of the Resistance
    Maffucci, Antonio
    Micciulla, Federico
    Cataldo, Antonino E.
    Miano, Giovanni
    Bellucci, Stefano
    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2017, 7 (04): : 485 - 493
  • [22] Contact resistance in carbon nanostructure via interconnects
    Wu, Wen
    Krishnan, Shoba
    Yamada, Toshishige
    Sun, Xuhui
    Wilhite, Patrick
    Wu, Raymond
    Li, Ke
    Yang, Cary Y.
    APPLIED PHYSICS LETTERS, 2009, 94 (16)
  • [23] Eutectic alloy electrode for rigid and low resistance carbon nanotube contact
    Park, Daehyun
    Jeon, Dongryul
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2012, 30 (06):
  • [24] Graphitic Interfacial Layer to Carbon Nanotube for Low Electrical Contact Resistance
    Chai, Yang
    Hazeghi, Arash
    Takei, Kuniharu
    Chen, Hong-Yu
    Chan, Philip C. H.
    Javey, Ali
    Wong, H. -S. Philip
    2010 INTERNATIONAL ELECTRON DEVICES MEETING - TECHNICAL DIGEST, 2010,
  • [25] LOW-TEMPERATURE MAGNETORESISTANCE OF A SPEER CARBON RESISTANCE THERMOMETER
    THOMPSON, JR
    THOMSON, JO
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1977, 48 (12): : 1713 - 1714
  • [26] Low-temperature resistance thermometers of carbon composite material
    Meshkovskii, I.K.
    Novikov, A.F.
    Sologub, V.V.
    Tatarinova, M.L.
    Instruments and experimental techniques New York, 1990, 32 (5 pt 2): : 1254 - 1255
  • [27] Deployment of titanium thermal barrier for low-temperature carbon nanotube growth
    Chen, GY
    Poa, CHP
    Henley, SJ
    Stolojan, V
    Silva, SRP
    Haq, S
    APPLIED PHYSICS LETTERS, 2005, 87 (25) : 1 - 3
  • [28] Carbon Nanotube Interconnects
    Naeemi, Azad
    Meindl, James D.
    ANNUAL REVIEW OF MATERIALS RESEARCH, 2009, 39 : 255 - 275
  • [29] Carbon Nanotube Interconnects
    Naeemi, Azad
    Meindl, James D.
    ISPD'07: PROCEEDINGS OF THE 2007 INTERNATIONAL SYMPOSIUM ON PHYSICAL DESIGN, 2007, : 77 - 84
  • [30] Electrical characterization of carbon nanotube vertical interconnects with different lengths and widths
    Vollebregt, Sten
    Ishihara, Ryoichi
    Tichelaar, Frans
    van der Cingel, Johan
    Beenakker, Kees
    2012 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE (IITC), 2012,
12345