Electrolytic PZT films

被引:29
|
作者
Zhitomirsky, I
GalOr, L
Kohn, A
Spang, MD
机构
[1] Israel Institute of Metals, Technion-Israel Inst. of Technology, Haifa
[2] Clausthal University, Clausthal-Zellerfeld
关键词
D O I
10.1023/A:1018524810686
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A novel method of cathodic deposition of complex oxide compounds has been demonstrated on the deposition of ferroelectric PZT films. In the proposed approach, PZT film formation on graphite and carbon fibre mat substrates was achieved via a peroxoprecursor. It was established that the atomic ratio of lead, zirconium and titanium in the deposit closely corresponded to that in the starting solutions. Formation of a perovskite PZT phase was observed at 500 degrees C. By variation of current density and deposition time the amount of the deposited material could be controlled. It was established that films obtained from solutions with hydrogen peroxide as an additive showed less tendency to crack.
引用
收藏
页码:803 / 807
页数:5
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