Electrolytic PZT films

被引:29
|
作者
Zhitomirsky, I
GalOr, L
Kohn, A
Spang, MD
机构
[1] Israel Institute of Metals, Technion-Israel Inst. of Technology, Haifa
[2] Clausthal University, Clausthal-Zellerfeld
关键词
D O I
10.1023/A:1018524810686
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A novel method of cathodic deposition of complex oxide compounds has been demonstrated on the deposition of ferroelectric PZT films. In the proposed approach, PZT film formation on graphite and carbon fibre mat substrates was achieved via a peroxoprecursor. It was established that the atomic ratio of lead, zirconium and titanium in the deposit closely corresponded to that in the starting solutions. Formation of a perovskite PZT phase was observed at 500 degrees C. By variation of current density and deposition time the amount of the deposited material could be controlled. It was established that films obtained from solutions with hydrogen peroxide as an additive showed less tendency to crack.
引用
收藏
页码:803 / 807
页数:5
相关论文
共 50 条
  • [31] Depolarisation of PZT thin films by nanoindentation
    Hvizdoš, P.
    Reece, M.J.
    Bushby, A.J.
    Whatmore, R.W.
    Zhang, Q.
    Algueró, M.
    Integrated Ferroelectrics, 2002, 50 : 199 - 207
  • [33] Preparation and characterization of PZT thin films
    Bose, A.
    Sreemany, M.
    Halder, S. K.
    Bhattacharyya, D. K.
    Sen, Suchitra
    SMART DEVICES: MODELING OF MATERIAL SYSTEMS, 2008, 1029 : 279 - +
  • [34] Seeding studies in PZT thin films
    Wu, A
    Vilarinho, PM
    Salvado, IMM
    Baptista, JL
    MATERIALS RESEARCH BULLETIN, 1998, 33 (01) : 59 - 68
  • [35] Interfacial Delamination of PZT Thin Films
    Shang, Fulin
    Yan, Yabin
    Kitamura, Takayuki
    IUTAM SYMPOSIUM ON MULTISCALE MODELLING OF FATIGUE, DAMAGE AND FRACTURE IN SMART MATERIALS, 2011, 24 : 189 - 196
  • [36] Applications of PZT piezoelectric films in MEMS
    Hu, Zheng-Jun
    Wang, Li
    Xu, Dong
    Cai, Bing-Chu
    Weixi Jiagong Jishu/Microfabrication Technology, 2001, (04):
  • [37] Piezoelectric properties of PZT films for microcantilever
    Cattan, E.
    Haccart, T.
    Vélu, G.
    Rémiens, D.
    Bergaud, C.
    Nicu, L.
    Sensors and Actuators, A: Physical, 1999, 74 (01): : 60 - 64
  • [38] Piezoelectric Activity of Thin PZT Films
    Biryukov, S. V.
    Golovko, Yu. I.
    Masychev, S. I.
    Mukhortov, V. M.
    Shelepo, A. P.
    TECHNICAL PHYSICS, 2009, 54 (08) : 1176 - 1178
  • [39] Interfacial delamination of PZT thin films
    Shang, Fulin
    Yan, Yabin
    Kitamura, Takayuki
    IUTAM Bookseries, 2011, 24 : 189 - 196
  • [40] GROWTH AND CHARACTERIZATION OF PZT THIN FILMS
    Bao, Daqun
    Zhang, Yi
    Guo, Hang
    MicroNano2008-2nd International Conference on Integration and Commercialization of Micro and Nanosystems, Proceedings, 2008, : 733 - 737