In-situ interferometric monitoring of optical coatings

被引：8

作者：

Nadji, Severin L. ^{[1
,3
]}

Lequime, Michel ^{[1
]}

Begou, Thomas ^{[1
]}

Koc, Cihan ^{[1
]}

Grezes-Besset, Catherine ^{[2
]}

Lumeau, Julien ^{[1
]}

机构：

[1] Aix Marseille Univ, Inst Fresnel, Cent Marseille, CNRS, Marseille, France

[2] CILAS Ariane Grp, 600 Ave RocheFourcade,ZI St Mitre, F-13400 Aubagne, France

[3] Max Planck Inst Gravitat Phys, Albert Einstein Inst, D-30167 Hannover, Germany

来源：

OPTICS EXPRESS | 2020年 / 28卷 / 15期

关键词：

CONSTANTS;

D O I：

10.1364/OE.394953

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of optical thin films. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：22012 / 22026

页数：15

共 50 条

[31] In-situ Low Concentration Monitoring of Ammonia Using an Optical Fibre Sensor
Dooly, G.
Manap, H.
O'Keeffe, S.
Lewis, E.
2011 IEEE SENSORS, 2011, : 242 - 245
[32] In-situ cure monitoring using optical fibre sensors - a comparative study
Powell, GR
Crosby, PA
Waters, DN
France, CM
Spooncer, RC
Fernando, GF
SMART MATERIALS & STRUCTURES, 1998, 7 (04): : 557 - 568
[33] Composite Anchors for Slope Stabilisation: Monitoring of their In-Situ Behaviour with Optical Fibre
Cola, Simonetta
Schenato, Luca
Brezzi, Lorenzo
Pangop, Francine Chantal Tchamaleu
Palmieri, Luca
Bisson, Alberto
GEOSCIENCES, 2019, 9 (05)
[34] In-situ monitoring of ammonia gas using an optical fibre based approach
Dooly, G.
Manap, H.
O'Keeffe, S.
Lewis, E.
SENSORS & THEIR APPLICATIONS XVI, 2011, 307
[35] In-situ monitoring of optical deposition of carbon nanotubes onto fiber end
Kashiwagi, Ken
Yamashita, Shinji
Set, Sze Yun
OPTICS EXPRESS, 2009, 17 (07): : 5711 - 5715
[36] Transceiver Technology with In-Situ Diagnostic Optical Power Monitoring for Defense Applications
Mahnkopf, S.
Louderback, D.
Harris, M.
Eustis, T.
Koleva, V.
Guilfoyle, P.
NANOPHOTONICS AND MACROPHOTONICS FOR SPACE ENVIRONMENTS IV, 2010, 7817
[37] Optical fiber sensing method for the in-situ cure monitoring of composite materials
Luo, F
Meng, AD
Liu, JY
Kim, K
Park, D
FIBER OPTIC AND LASER SENSORS XIV, 1996, 2839 : 413 - 419
[38] In-situ optical monitoring of single-crystal silicon membrane etching
Chollet, Franck
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 21 (06): : 1287 - 1292
[39] In-situ out-core monitoring using optical fibers with scintillators
Sakasai, K
Katagiri, M
2002 IEEE NUCLEAR SCIENCE SYMPOSIUM, CONFERENCE RECORD, VOLS 1-3, 2003, : 397 - 400
[40] In-situ optical monitoring of single-crystal silicon membrane etching
Franck Chollet
Microsystem Technologies, 2015, 21 : 1287 - 1292

← 1 2 3 4 5 →