In-situ interferometric monitoring of optical coatings

被引：8

作者：

Nadji, Severin L. ^{[1
,3
]}

Lequime, Michel ^{[1
]}

Begou, Thomas ^{[1
]}

Koc, Cihan ^{[1
]}

Grezes-Besset, Catherine ^{[2
]}

Lumeau, Julien ^{[1
]}

机构：

[1] Aix Marseille Univ, Inst Fresnel, Cent Marseille, CNRS, Marseille, France

[2] CILAS Ariane Grp, 600 Ave RocheFourcade,ZI St Mitre, F-13400 Aubagne, France

[3] Max Planck Inst Gravitat Phys, Albert Einstein Inst, D-30167 Hannover, Germany

来源：

OPTICS EXPRESS | 2020年 / 28卷 / 15期

关键词：

CONSTANTS;

D O I：

10.1364/OE.394953

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of optical thin films. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：22012 / 22026

页数：15

共 50 条

[21] Wireless charging flexible in-situ optical sensing for food monitoring
Zhang, Ruihua
Wang, Meng
Zhu, Tianyu
Wan, Zhengzhong
Chen, Xujun
Xiao, Xinqing
CHEMICAL ENGINEERING JOURNAL, 2024, 488
[22] CHEMISTRY OF IN-SITU PHOSPHATIZING COATINGS
LIN, CT
QVYJT, F
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 207 : 39 - PMSE
[23] In-situ optical monitoring of Langmuir-Blodgett films deposited on optical fibers
Itadera, K
Kuniyoshi, S
Iizuka, M
Kudo, K
Tanaka, K
MOLECULAR CRYSTALS AND LIQUID CRYSTALS SCIENCE AND TECHNOLOGY SECTION A-MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 1995, 267 : 229 - 234
[24] In-situ monitoring of microtunneling
Kastner, R
Pellet, AL
Ouvry, JF
Guilloux, A
INTERNATIONAL NO-DIG '96 - INTERNATIONAL CONFERENCE AND EXHIBITION OF TRENCHLESS TECHNOLOGY: TRENCHLESS SOUNDS THE RIGHT NOTE, 1996, : 170 - 182
[25] In-Situ Particle Monitoring
Hunt, D. John
Clean Tech, 2001, 1 (03):
[26] Control and monitoring of growth of chromium nitride coatings using in-situ spectroscopic ellipsometry
Aouadi, SM
Gorishnyy, TZ
Schultze, DM
Rohde, SL
SURFACE & COATINGS TECHNOLOGY, 2002, 153 (01): : 1 - 9
[27] Characterization of laser cladding functional coatings: an in-situ monitoring and variability analysis approach
Mousa, Malek
Osman, Hany
Azab, Ahmed
El-Gaddar, Abdulnasser
Baki, Fazle
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2024, 133 (3-4): : 1155 - 1183
[28] In-situ interferometric curing monitoring for digital light processing based vat photopolymerization additive manufacturing
Zhang, Yue
Zhang, Haolin
Zhao, Xiayun
ADDITIVE MANUFACTURING, 2024, 81
[29] In-situ ex-core monitoring using optical fibers with scintillators
Sakasai, K
Katagiri, M
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2003, 50 (04) : 1086 - 1089
[30] OPTICAL IN-SITU MONITORING OF SILICON DIAPHRAGM THICKNESS DURING WET ETCHING
TOSAKA, H
MINAMI, K
ESASHI, M
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1995, 5 (01) : 41 - 46

← 1 2 3 4 5 →