In-situ interferometric monitoring of optical coatings

被引：8

作者：

Nadji, Severin L. ^{[1
,3
]}

Lequime, Michel ^{[1
]}

Begou, Thomas ^{[1
]}

Koc, Cihan ^{[1
]}

Grezes-Besset, Catherine ^{[2
]}

Lumeau, Julien ^{[1
]}

机构：

[1] Aix Marseille Univ, Inst Fresnel, Cent Marseille, CNRS, Marseille, France

[2] CILAS Ariane Grp, 600 Ave RocheFourcade,ZI St Mitre, F-13400 Aubagne, France

[3] Max Planck Inst Gravitat Phys, Albert Einstein Inst, D-30167 Hannover, Germany

来源：

OPTICS EXPRESS | 2020年 / 28卷 / 15期

关键词：

CONSTANTS;

D O I：

10.1364/OE.394953

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of optical thin films. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：22012 / 22026

页数：15

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