Nanofabrication in transparent materials with a femtosecond pulse laser

被引:59
|
作者
Shimotsuma, Yasuhiko [1 ]
Hirao, Kazuyuki
Qiu, Jianrong
Miura, Kiyotaka
机构
[1] Kyoto Univ, Grad Sch Engn, Dept Chem Mat, Nishikyo Ku, Kyoto 6158510, Japan
[2] Japan Sci & Technol Agcy, Kyoto 6190237, Japan
[3] Zhejiang Univ, Dept Mat Sci & Engn, Hangzhou 310027, Peoples R China
[4] Cent Glass Corp, Opt Device Dev Dept, Ube, Yamaguchi 7550001, Japan
关键词
laser-matter interactions; optical microscopy; scanning electron microscopy; silica; silicates; soda-lime-silica; tellurites;
D O I
10.1016/j.jnoncrysol.2005.11.060
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Femtosecond lasers have been applied for materials processing when high accuracy and small structure size are required. Various induced structures have been observed inside glasses after the femtosecond laser irradiation. We report the femtosecond laser induced refractive-index change, space-selective valence state change of active ions, formation of nanograting, and precipitation and distribution of nanoparticles. We systematically studied the morphology of structures that are induced in the bulk of transparent materials by the tightly focused femtosecond laser radiation. Rugby-ball-like asymmetric induced structures were observed inside Ag+-doped silicate glass. These structures are due to the aggregation of Ag nanoparticles at the depth of the focal point. The size of the induced structure depended on the time interval between successive femtosecond laser pulses. In the case of zinc-tellurite glass, TeO2 rich parts were formed in the center of the focal spot.. while zinc migrated to the outside. The mechanisms of the observed phenomena are discussed. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:646 / 656
页数:11
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