Femtosecond laser direct writing in transparent materials based on nonlinear absorption

被引:18
|
作者
Jiang, Li Jia [1 ]
Maruo, Shoji [2 ]
Osellame, Roberto [3 ,4 ]
Xiong, Wei [5 ]
Campbell, John H. [6 ]
Lu, Yong Feng [1 ]
机构
[1] Univ Nebraska Lincoln, Dept Elect & Comp Engn, Lincoln, NE 68588 USA
[2] Yokohama Natl Univ, Dept Mech Engn & Mat Sci, Grad Sch Engn, Yokohama, Kanagawa, Japan
[3] Italian Natl Res Council, Inst Photon & Nanotechnol, Rome, Italy
[4] Polytech Univ Milan, Dept Phys, Milan, Italy
[5] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan, Peoples R China
[6] Mat Sci Solut Inc, New York, NY USA
基金
美国国家科学基金会;
关键词
3-DIMENSIONAL PHOTONIC CRYSTALS; CARBON NANOTUBES; 2-PHOTON POLYMERIZATION; MECHANICAL-PROPERTIES; WAVE-GUIDES; FABRICATION; MICROFABRICATION; DRIVEN; GLASS; FUNCTIONALIZATION;
D O I
10.1557/mrs.2016.272
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Femtosecond laser direct writing (FsLDW) in transparent materials is a laser-based precise three-dimensional (3D) micro/nanofabrication method that has shown great potential for applications. The advantages of FsLDW originate in the nonlinear nature of absorption in the multiphoton absorption process. Over the past few years, transparent material micro/nanofabrication using FsLDW has seen several developments in materials and applications. Specifi cally, two-photon polymerization has been widely used as a precision direct-writing process for fabrication of polymeric 3D micro/nanostructures; internal/surface ablation of polymer 3D structures based on multiphoton absorption has been demonstrated and developed as a promising subtractive manufacturing technique; and femtosecond laser multiphoton modification in glass has been intensively studied for refractive-index change and generation of nanogratings and microvoids. This article describes the latest research on FsLDW in polymers and glasses with specific applications for large-dimension fabrication, microelectromechanical systems, microphotonics, and microfluidics.
引用
收藏
页码:975 / 983
页数:9
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