Measurement of the plasma potential in a magnetron discharge and inference of the electric field

被引：0
|
作者：
Thompson, S [1 ]
Bradley, JW [1 ]
机构：
[1] Univ Manchester, Dept Phys, Manchester M60 1QD, Lancs, England
来源：
PPPS-2001: PULSED POWER PLASMA SCIENCE 2001, VOLS I AND II, DIGEST OF TECHNICAL PAPERS | 2001年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Using an emissive probe the structure of plasma potential V-p in the bulk plasma of a DC Magnetron discharge has been determined for a three different magnetic field configurations. The results reveal a large axial variation in the space potential in the confined plasma, with DeltaV(p) similar to 25V over a distance of 5 cm, from plasma to target. Using the potential distribution, we calculated the corresponding electric field.
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页码：430 / 433
页数：4
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