Measurement of the plasma potential in a magnetron discharge and inference of the electric field

被引：0

作者：

Thompson, S ^{[1
]}

Bradley, JW ^{[1
]}

机构：

[1] Univ Manchester, Dept Phys, Manchester M60 1QD, Lancs, England

来源：

PPPS-2001: PULSED POWER PLASMA SCIENCE 2001, VOLS I AND II, DIGEST OF TECHNICAL PAPERS | 2001年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using an emissive probe the structure of plasma potential V-p in the bulk plasma of a DC Magnetron discharge has been determined for a three different magnetic field configurations. The results reveal a large axial variation in the space potential in the confined plasma, with DeltaV(p) similar to 25V over a distance of 5 cm, from plasma to target. Using the potential distribution, we calculated the corresponding electric field.

引用

页码：430 / 433

页数：4

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