Control of p-type conduction in a-plane GaN grown on sapphire r-plane substrate

被引:40
|
作者
Tsuchiya, Y [1 ]
Okadome, Y [1 ]
Honshio, A [1 ]
Miyake, Y [1 ]
Kawashima, T [1 ]
Iwaya, M [1 ]
Kamiyama, S [1 ]
Amano, H [1 ]
Akasaki, I [1 ]
机构
[1] Meijo Univ, Fac Sci & Technol, 21st Century COE Program Nanofactory, Tempaku Ku, Nagoya, Aichi 4688502, Japan
关键词
a-plane GaN; p-type; Mg; Hall-effect measurement; PL; r-plane sapphire;
D O I
10.1143/JJAP.44.L1516
中图分类号
O59 [应用物理学];
学科分类号
摘要
Mg-doped p-type a-plane GaN films were grown on high-quality unintentionally doped GaN on +0.5 degrees-off r-plane sapphire substrates by metalorganic vapor phase epitaxy (MOVPE). A maximum hole concentration of 2.0 x 10(18) cm(-3) was reproducibly achieved at room temperature, which was higher than the maximum hole concentration of p-type c-plane GaN. The activation energy of Mg acceptors in p-type a-plane GaN with a hole concentration of 2.0 x 10(18) cm(-3) was found to be 118 meV by temperature-dependent Hall-effect measurement.
引用
收藏
页码:L1516 / L1518
页数:3
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