Amorphous alloy film formed in an immiscible Cu-Ta system by ion beam assisted deposition

被引：16
|
作者：
Zeng, F [1 ]
Ding, M [1 ]
Zhao, B [1 ]
Pan, F [1 ]
机构：
[1] Tsing Hua Univ, Dept Mat Sci & Engn, Adv Mat Lab, Beijing 100084, Peoples R China
来源：
MATERIALS LETTERS | 2002年 / 53卷 / 1-2期
基金：
中国国家自然科学基金;
关键词：
amorphous alloy film; Cu-Ta; ion beam assisted deposition;
D O I：
10.1016/S0167-577X(01)00450-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Amorphous alloy films were obtained in the Cu-Ta system with positive heat of mixing by ion beam assisted deposition (IBAD) technique. It was found that among the various compositions studied, an amorphous film was only achieved in the alloys around the composition of Cu30Ta70. The amorphization mechanism under ion beam assisted deposition process was also discussed. (C) 2002 Elsevier Science B.V. Allrights reserved.
引用
收藏
页码：40 / 43
页数：4
相关论文
共 50 条
  • [31] Ion sources for ion beam assisted thin film deposition
    Svadkovski, IV
    Dostanko, AP
    ION-SOLID INTERACTIONS FOR MATERIALS MODIFICATION AND PROCESSING, 1996, 396 : 635 - 640
  • [32] Low energy ion assisted deposition of Ta/Cu films
    Quan, J.J.
    Zhou, X.W.
    He, L.
    Hull, R.
    Wadley, H.N.G.
    Journal of Applied Physics, 2007, 101 (02):
  • [33] Low energy ion assisted deposition of Ta/Cu films
    Quan, J. J.
    Zhou, X. W.
    He, L.
    Hull, R.
    Wadley, H. N. G.
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (02)
  • [34] Calculation of phonon spectra to predict the high-pressure metastable phase in an equilibrium immiscible Cu-Ta system
    Kong, Y
    Gong, HR
    Liu, BX
    APPLIED PHYSICS LETTERS, 2004, 85 (09) : 1517 - 1519
  • [35] Mechanical properties and thermal stability of TiAlN/Ta multilayer film deposited by ion beam assisted deposition
    Shang, Hongfei
    Li, Jian
    Shao, Tianmin
    APPLIED SURFACE SCIENCE, 2014, 310 : 317 - 320
  • [36] Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition
    Shang, Hongfei
    Li, Jian
    Shao, Tianmin
    ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2014, 2014
  • [37] The properties of BCN films formed by ion beam assisted deposition
    Yasui, H
    Hirose, Y
    Awazu, K
    Iwaki, M
    COLLOIDS AND SURFACES B-BIOINTERFACES, 2000, 19 (03) : 291 - 295
  • [38] Amorphous silicon deposited by xenon ion beam assisted deposition
    Barbieri, P. F.
    de Oliveira, M. H., Jr.
    Champi, A.
    Marques, F. C.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (9-20) : 1016 - 1019
  • [39] Metastable phases in Co-Ag system formed by ion beam assisted deposition at the glancing ion incidence
    Zeng, F.
    Zong, R. L.
    Gu, Y. L.
    Lv, F.
    Pan, F.
    Wang, J.
    Yan, W. S.
    He, B.
    Xie, Y. N.
    Liu, T.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 260 (02): : 547 - 552
  • [40] Radiation tolerance and microstructural changes of nanocrystalline Cu-Ta alloy to high dose self-ion irradiation
    Srinivasan, S.
    Kale, C.
    Hornbuckle, B. C.
    Darling, K. A.
    Chancey, M. R.
    Hernandez-Rivera, E.
    Chen, Y.
    Koenig, T. R.
    Wang, Y. Q.
    Thompson, G. B.
    Solanki, K. N.
    ACTA MATERIALIA, 2020, 195 (195) : 621 - 630
12345