Amorphous alloy film formed in an immiscible Cu-Ta system by ion beam assisted deposition

被引：16
|
作者：
Zeng, F [1 ]
Ding, M [1 ]
Zhao, B [1 ]
Pan, F [1 ]
机构：
[1] Tsing Hua Univ, Dept Mat Sci & Engn, Adv Mat Lab, Beijing 100084, Peoples R China
来源：
MATERIALS LETTERS | 2002年 / 53卷 / 1-2期
基金：
中国国家自然科学基金;
关键词：
amorphous alloy film; Cu-Ta; ion beam assisted deposition;
D O I：
10.1016/S0167-577X(01)00450-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Amorphous alloy films were obtained in the Cu-Ta system with positive heat of mixing by ion beam assisted deposition (IBAD) technique. It was found that among the various compositions studied, an amorphous film was only achieved in the alloys around the composition of Cu30Ta70. The amorphization mechanism under ion beam assisted deposition process was also discussed. (C) 2002 Elsevier Science B.V. Allrights reserved.
引用
收藏
页码：40 / 43
页数：4
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