Performance and Properties of Ultra-Thin Silicon Nitride X-ray Windows

被引：13
|
作者：
Torma, Pekka T. [1 ]
Kostamo, Jari [1 ]
Sipila, Heikki [1 ]
Mattila, Marco [1 ,2 ]
Kostamo, Pasi [1 ]
Kostamo, Esa [1 ]
Lipsanen, Harri [2 ]
Laubis, Christian [3 ]
Scholze, Frank [3 ]
Nelms, Nick [4 ]
Shortt, Brian [4 ]
Bavdaz, Marcos [4 ]
机构：
[1] HS Foils Oy, Espoo 02150, Finland
[2] Aalto Univ, Dept Micro & Nanosci, Micronova, Aalto 00076, Finland
[3] Phys Tech Bundesanstalt, D-10587 Berlin, Germany
[4] ESA ESTEC, NL-2200 AG Noordwijk, Netherlands
来源：
IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 2014年 / 61卷 / 01期
关键词：
Optical films; space technology; X-ray applications; X-ray detectors; X-ray filters; X-ray windows; CHEMICAL-VAPOR-DEPOSITION; SYNCHROTRON-RADIATION; HIGH-RESOLUTION; EUV METROLOGY; DIAMOND; PTB; ABSORPTION; DETECTORS; OPTICS; FILMS;
D O I：
10.1109/TNS.2014.2298434
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The spectral transmittance of a new generation of SiN based X-ray windows is characterized. The windows are strengthened by low aspect-ratio support grid. As expected for this unprecedented thin window material, the transmittance in the soft X-ray spectral region outperforms the present technologies. A detailed study of the various performance properties of the fabricated SiN X-ray windows is presented. Besides their high transmittance, the windows also have high uniformity, high mechanical strength and good leak tightness. The windows can withstand temperatures from cryogenic range to approximately 250 degrees C. SiN foils are the first real nanotechnology-based choice for the practical realization of X-ray windows and bring the performance to a level that only nanotechnology can offer.
引用
收藏
页码：695 / 699
页数：5
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