Efficient readout of micromechanical resonator arrays in ambient conditions

被引：16
|
作者：
Venstra, W. J. [1 ]
van der Zant, H. S. J. [1 ]
机构：
[1] Delft Univ Technol, Kavli Inst Nanosci, NL-2628 CJ Delft, Netherlands
来源：
APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 23期
关键词：
micromechanical resonators; readout electronics;
D O I：
10.1063/1.3042097
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We present a method for efficient spectral readout of mechanical resonator arrays in dissipative environments. Magnetomotive drive and detection are used to drive double clamped resonators in the nonlinear regime. Resonators with almost identical resonance frequencies can be tracked individually by sweeping the drive power. Measurements are performed at room temperature and atmospheric pressure. These conditions enable application in high throughput resonant sensor arrays.
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页数：3
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