Efficient readout of micromechanical resonator arrays in ambient conditions

被引：16

作者：

Venstra, W. J. ^{[1
]}

van der Zant, H. S. J. ^{[1
]}

机构：

[1] Delft Univ Technol, Kavli Inst Nanosci, NL-2628 CJ Delft, Netherlands

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 23期

关键词：

micromechanical resonators; readout electronics;

D O I：

10.1063/1.3042097

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a method for efficient spectral readout of mechanical resonator arrays in dissipative environments. Magnetomotive drive and detection are used to drive double clamped resonators in the nonlinear regime. Resonators with almost identical resonance frequencies can be tracked individually by sweeping the drive power. Measurements are performed at room temperature and atmospheric pressure. These conditions enable application in high throughput resonant sensor arrays.

引用

页数：3

共 50 条

[21] Dispersive and Dissipative Coupling in a Micromechanical Resonator Embedded with a Nanomechanical Resonator
Mahboob, I.
Perrissin, N.
Nishiguchi, K.
Hatanaka, D.
Okazaki, Y.
Fujiwara, A.
Yamaguchi, H.
NANO LETTERS, 2015, 15 (04) : 2312 - 2317
[22] Topology optimization in micromechanical resonator design
Wei He
David Bindel
Sanjay Govindjee
Optimization and Engineering, 2012, 13 : 271 - 292
[23] VOLTAGE ACTIVATED MICROMECHANICAL TRANSLATOR WITH ELECTRICAL READOUT
LEONARD, RW
SEGUIN, HJ
REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (12): : 1745 - &
[24] Topology optimization in micromechanical resonator design
He, Wei
Bindel, David
Govindjee, Sanjay
OPTIMIZATION AND ENGINEERING, 2012, 13 (02) : 271 - 292
[25] A Micromechanical Resonator to Reach the Quantum Regime
Bahriz, M.
Ducloux, O.
Masson, S.
Janiaud, D.
Le Traon, O.
Kuhn, A.
Molinelli, C.
Briant, T.
Cohadon, P. -F
Heidmann, A.
Michel, C.
Pinard, L.
Flaminio, R.
2010 IEEE SENSORS, 2010, : 1991 - 1995
[26] Thermally excited micromechanical vacuum resonator
Wang, Yaqiang
Jin, Zhonghe
Wang, Yuelin
Ding, Chun
International Conference on Solid-State and Integrated Circuit Technology Proceedings, : 950 - 952
[27] Thermally excited micromechanical vacuum resonator
Wang, YQ
Jin, ZH
Wang, YL
Ding, C
1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, 1998, : 950 - 952
[28] Thermally excited micromechanical vacuum resonator
Wang, Yaqiang
Jin, Zhonghe
Wang, Yuelin
Ding, Chun
International Conference on Solid-State and Integrated Circuit Technology Proceedings, 1998, : 950 - 952
[29] Micromechanical bulk acoustic wave resonator
Mattila, T
Oja, A
Seppä, H
Jaakkola, O
Kiihamäki, J
Kattelus, H
Koskenvuori, M
Rantakari, P
Tittonen, I
2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2002, : 945 - 948
[30] Linear Micromechanical Phased Arrays
Solgaard, Olav
Hamann, Stephen S.
Landry, Joseph R.
2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2019, : 174 - 175

← 1 2 3 4 5 →