Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

被引：13

作者：

Zhou, Xin ^{[1
,2
]}

Xiao, Dingbang ^{[1
]}

Li, Qingsong ^{[1
]}

Hu, Qian ^{[1
]}

Hou, Zhanqiang ^{[1
]}

He, Kaixuan ^{[3
,4
]}

Chen, Zhihua ^{[1
]}

Zhao, Chun ^{[2
]}

Wu, Yulie ^{[1
]}

Wu, Xuezhong ^{[1
]}

Seshia, Ashwin ^{[2
]}

机构：

[1] Natl Univ Def Technol, Coll Mechatron Engn & Automat, Changsha 410073, Hunan, Peoples R China

[2] Univ Cambridge, Nanosci Ctr, Cambridge CB3 0FF, England

[3] Fudan Univ, Sch Microelect, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China

[4] East China Inst Photoelect IC, Bengbu 233042, Peoples R China

来源：

MICROMACHINES | 2018年 / 9卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Microelectromechanical systems; quality factor; thermoelastic dissipation; clamping loss; disk resonator; gyroscope; MEMS; GYROSCOPE; SENSITIVITY; RING;

D O I：

10.3390/mi9010025

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is surpassed by clamping loss. The stiffness-mass decoupling design method, combined with reducing the beam width, was used to engineer high Q(TED). Experiments show that Q of the (111) disk resonator have an upper boundary that is determined by the clamping loss caused by the unbalanced out-of-plane displacement. The origin of the out-of-plane displacement is explained by theory and simulation.

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页数：9

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