Confocal multiple-transmitted-light interference microscope with increased lateral resolution

被引：0
|
作者：
Qiu, Lirong [1 ]
Zhao, Weiqian [1 ]
机构：
[1] Beijing Inst Technol, Beijing Key Lab Precis Optoelect Measurement Inst, Sch Optoelect, Beijing 100081, Peoples R China
来源：
OPTICAL ENGINEERING | 2013年 / 52卷 / 10期
基金：
中国国家自然科学基金;
关键词：
confocal microscopy; confocal interference; lateral resolution; resolution enhancement; SPATIAL-RESOLUTION; PROBE;
D O I：
10.1117/1.OE.52.10.100504
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A plane-parallel plate of a specific thickness placed in front of the collecting lens in a confocal microscope (CM) is used to produce multiple-transmitted-light interference to sharpen the Airy main lobe so that the lateral resolution in the x-direction can be further improved. Numerical experiments show that the lateral full-width at half maximum in the x-direction has been narrowed down to 50 nm, and the lateral resolution has been improved by 80% in comparison with a conventional CM when thickness d = 5 mm, reflectivity R = 0.7, and NA = 0.65. (C) 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
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页数：3
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