Room-temperature blue luminescence of thermally oxidized Si1-x-yGexCy thin films on Si (100) substrates

被引:1
|
作者
Cheng, XM [1 ]
Zheng, YD [1 ]
Liu, XB [1 ]
Zang, L [1 ]
Lo, ZY [1 ]
Zhu, SM [1 ]
Han, P [1 ]
Jiang, RL [1 ]
机构
[1] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China
关键词
D O I
10.1063/1.125342
中图分类号
O59 [应用物理学];
学科分类号
摘要
We measured at room temperature the photoluminescence spectra of the thermally oxidized Si1-x-yGexCy thin films which were grown on silicon substrates by plasma-enhanced chemical vapor deposition and then wet oxidized at 1100 degrees C for 20 min. The photoluminescence band with a peak at similar to 393 nm under the exciting radiation of lambda = 241 nm was observed. Possible mechanism of this photoluminescence is discussed. (C) 1999 American Institute of Physics. [S0003-6951(99)01147-X].
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页码:3333 / 3335
页数:3
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