A vision for a next-generation 300mm factory

被引：0
|
作者：
Rothe, O. [1 ]
Van Eck, B. [1 ]
Fandel, D.
Wright, R.
机构：
[1] Int SEMATECH Mfg Initiat, Next Generat Factory Program, Austin, TX 78741 USA
来源：
SOLID STATE TECHNOLOGY | 2008年 / 51卷 / 10期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
To help meet next-generation factory (NGF) challenges, ISMI has been tasked by its member companies to explore ways in which improvement in cycle time and cost reductions can achieve targets of 50% and 30%, respectively, by 2012. This paper describes ISMI's NGF Program activities that are focused to achieve these goals.
引用
收藏
页码：24 / +
页数：3
相关论文
共 50 条
  • [31] 300mm implant: Pilot production at SEMICONDUCTOR300
    Zeakes, JS
    Franke, DW
    Neumann, J
    Breeden, T
    [J]. 2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS, 2000, : 360 - 363
  • [32] 300mm Prime and the prospect for 450mm wafers
    Jones, Scotten W.
    [J]. SOLID STATE TECHNOLOGY, 2009, 52 (12) : 14 - 15
  • [33] Simulation modeling for 300mm semiconductor factories
    Campbell, E
    Wright, R
    Cheatham, J
    Schulz, M
    Berry, JL
    [J]. SOLID STATE TECHNOLOGY, 2000, 43 (10) : 95 - +
  • [34] 300mm圆片技术障碍
    [J]. 电子工业专用设备, 1997, (02) : 64 - 64
  • [35] 大陆300mm晶圆厂分布
    [J]. 电子工业专用设备, 2015, (12) : 53 - 54
  • [36] The rocky road to 300mm automated factories
    Haavind, R
    [J]. SOLID STATE TECHNOLOGY, 2003, 46 (01) : 12 - 12
  • [37] AMD builds 300mm fab in Germany
    不详
    [J]. INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2004, 34 (01): : 77 - 77
  • [38] LWR enhancement for 300mm track processing
    Stokes, Harold
    Vandereyken, Jelle
    Drent, Waut
    Harumoto, Masahiko
    Asai, Masaya
    Tanaka, Yuji
    Nakayama, Chisayo
    Pieczulewski, Charles
    [J]. ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXV, 2018, 10586
  • [39] Microeconomics of 300mm process module control
    Monahan, KM
    Chatterjee, A
    Falessi, G
    Levy, A
    Stoller, M
    [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XV, 2001, 4344 : 530 - 543
  • [40] Mitsubishi to build 300mm fab in Kochi
    不详
    [J]. SOLID STATE TECHNOLOGY, 2001, : S35 - S35
12345