共 50 条
- [1] CIM for 300mm semiconductor fab [J]. PROCESS, EQUIPMENT, AND MATERIALS CONTROL IN INTEGRATED CIRCUIT MANUFACTURING III, 1997, 3213 : 162 - 170
- [2] Sorter automatic operations in a 300mm fab [J]. 2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP, 2002, : 119 - 122
- [3] AMD builds 300mm fab in Germany [J]. INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2004, 34 (01): : 77 - 77
- [4] Optimization of a simulation for 300mm FAB semiconductor manufacturing [J]. COMPUTATIONAL SCIENCE AND ITS APPLICATIONS - ICCSA 2006, PT 5, 2006, 3984 : 260 - 268
- [6] Hierarchical distributed simulation for 300mm wafer fab [J]. PROCEEDINGS OF THE 2007 WINTER SIMULATION CONFERENCE, VOLS 1-5, 2007, : 1753 - 1759
- [7] Test wafer control system in 300mm FAB [J]. 2004 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP PROCEEDINGS, 2004, : 33 - 36
- [9] A new fab concept in the 300mm wafer era [J]. ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS, 2000, : 44 - 47
- [10] 300mm fab automation technology options and selection criteria [J]. 1997 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP - ASMC 97 PROCEEDINGS: THEME - THE QUEST FOR SEMICONDUCTOR MANUFACTURING EXCELLENCE: LEADING THE CHARGE INTO THE 21ST CENTURY, 1997, : 373 - 379