A vision for a next-generation 300mm factory

被引：0
|
作者：
Rothe, O. [1 ]
Van Eck, B. [1 ]
Fandel, D.
Wright, R.
机构：
[1] Int SEMATECH Mfg Initiat, Next Generat Factory Program, Austin, TX 78741 USA
来源：
SOLID STATE TECHNOLOGY | 2008年 / 51卷 / 10期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
To help meet next-generation factory (NGF) challenges, ISMI has been tasked by its member companies to explore ways in which improvement in cycle time and cost reductions can achieve targets of 50% and 30%, respectively, by 2012. This paper describes ISMI's NGF Program activities that are focused to achieve these goals.
引用
收藏
页码：24 / +
页数：3
相关论文
共 50 条
  • [1] High-productivity 300mm HDP-CVD for next-generation gap fill processes
    Geoffrion, B
    Dubey, N
    Krishnaraj, P
    [J]. PLASMA PROCESSING XIV, 2002, 2002 (17): : 43 - 49
  • [2] 300mm is reshaping the factory automation market
    Castellano, RN
    [J]. SOLID STATE TECHNOLOGY, 2002, 45 (02) : 38 - +
  • [3] 300mm factory layout and automated materials handling
    Wright, R
    Cunningham, C
    Benhayoune, K
    Campbell, E
    Swaminathan, V
    White, R
    [J]. SOLID STATE TECHNOLOGY, 1999, 42 (12) : 35 - +
  • [4] 300mm factory automation experience and challenges for wafer foundry fabs
    Hung, CH
    Lin, LR
    [J]. 2001 IEEE INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, CONFERENCE PROCEEDINGS, 2001, : 377 - 380
  • [5] Factory automation migration experience for foundry Fab from 200mm to 300mm
    Lin, LR
    Chu, HL
    Hung, CH
    Lee, YC
    Yeh, PC
    [J]. 2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP, 2002, : 278 - 281
  • [6] 300mm×300mm×12mm方形钢管直接成方工艺研究
    杜红青
    [J]. 焊管, 2008, (01) : 53 - 56
  • [7] 新型Φ300mm弯管机
    张立
    [J]. 钢管, 2011, 40 (05) : 75 - 75
  • [8] Is lithography ready for 300mm?
    Charles, A
    Haris, C
    Hornig, S
    Ganz, D
    Schedel, T
    Hraschan, G
    Köstler, W
    Maltabes, J
    Mautz, K
    Schmidt, S
    Schuster, R
    [J]. CHALLENGES IN PROCESS INTEGRATION AND DEVICE TECHNOLOGY, 2000, 4181 : 254 - 264
  • [9] 300mm片子动向
    [J]. 电子工业专用设备, 1997, (03) : 2 - 5
  • [10] 走向300mm之路
    Robert Haavind
    [J]. 电子产品世界, 2000, (11) : 34 - 34
12345